JPS622266B2 - - Google Patents

Info

Publication number
JPS622266B2
JPS622266B2 JP54093631A JP9363179A JPS622266B2 JP S622266 B2 JPS622266 B2 JP S622266B2 JP 54093631 A JP54093631 A JP 54093631A JP 9363179 A JP9363179 A JP 9363179A JP S622266 B2 JPS622266 B2 JP S622266B2
Authority
JP
Japan
Prior art keywords
etching
sensitive
region
contact
separated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54093631A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5618753A (en
Inventor
Yukio Matsuzawa
Kazumuki Yanagisawa
Hironobu Aoki
Takashi Mizusaki
Osamu Onizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP9363179A priority Critical patent/JPS5618753A/ja
Publication of JPS5618753A publication Critical patent/JPS5618753A/ja
Publication of JPS622266B2 publication Critical patent/JPS622266B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP9363179A 1979-07-25 1979-07-25 Preparation of chemical-sensitive element Granted JPS5618753A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9363179A JPS5618753A (en) 1979-07-25 1979-07-25 Preparation of chemical-sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9363179A JPS5618753A (en) 1979-07-25 1979-07-25 Preparation of chemical-sensitive element

Publications (2)

Publication Number Publication Date
JPS5618753A JPS5618753A (en) 1981-02-21
JPS622266B2 true JPS622266B2 (en]) 1987-01-19

Family

ID=14087672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9363179A Granted JPS5618753A (en) 1979-07-25 1979-07-25 Preparation of chemical-sensitive element

Country Status (1)

Country Link
JP (1) JPS5618753A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107576688A (zh) * 2017-09-22 2018-01-12 铜陵泽辉电子有限责任公司 一种薄膜电容器精度自动化检测方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5466194A (en) * 1977-11-04 1979-05-28 Kuraray Co Fet sensor

Also Published As

Publication number Publication date
JPS5618753A (en) 1981-02-21

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